Show simple item record

dc.contributor.authorGirshick, S.L.
dc.contributor.authorSwihart, M.T.
dc.contributor.authorSuh, S.M.
dc.contributor.authorMahajan, M.R.
dc.contributor.authorNijhawan, S.
dc.date.accessioned2016-01-15T20:46:23Z
dc.date.available2016-01-15T20:46:23Z
dc.date.issued2000
dc.identifier.urihttp://hdl.handle.net/10477/41337
dc.language.isoen_USen_US
dc.publisherJ. Electrochem. Soc.en_US
dc.titleNumerical modeling of gas-phase nucleation and particle growth during chemical vapor deposition of siliconen_US


Files in this item

Thumbnail
Thumbnail

This item appears in the following Collection(s)

Show simple item record