Cathodic arc deposition, metal coatings from the electric arc
Eno, David Michael
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The purpose of this work is to understand the operating principals and improve the performance of our P[barbelow]ulsed A[barbelow]rc M[barbelow]olecular B[barbelow]eam D[barbelow]eposition (PAMBD) device and to catalog certain experiments performed and conclusions made thereupon over the time period between December 2008 and August 2009. The work will first begin with a theoretical study of how cathodic arc deposition processes function to allow the reader to develop a clear picture of this machine and its evolution. Second, the work will cover several key projects that we completed in collaboration with professors Cerne, Zheng, and Efstathiadis, and use these as springboard to take a critical look at machine performance. Thirdly, several process enhancement projects which were undertaken by our group will be covered and evaluated, and finally future projects and machine modifications will be briefly discussed.