A Microfabricated dc-substitution calorimeter for low power measurement
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Accurate measurement of power can be considered to be a significant part of the design of any microwave or high frequency device, having very important commercial ramifications. Measurement of power is important for the performance of the device to be duplicated at different times and at different instances with repeatable accuracy. A flow calorimeter capable of measuring very low microwave power contained in guided, electro-magnetic waves in the microwave frequency range is proposed. Calorimetric techniques are known to be the most accurate method for the measurement of RF power. In fact, the National Institute of Standards (NIST) maintains transfer references for a standard watt of RF power in the form of various absolute-flow microwave calorimeters for different frequency bands. However using calorimetric methods for very low power has significant challenges. Our design is an attempt to address this issue by developing a micro fabricated calorimeter. This novel implementation of micro fabrication would be capable of modulation-invariant power measurements well below 100 μW at frequencies well above 25GHz. In addition, high-accuracy calibration of this device could be accomplished with simple DC substitution.