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dc.contributor.authorLee, G.C.en_US
dc.contributor.authorLiang, Z.
dc.contributor.authorSong, J.W.
dc.contributor.authorShen J.D.
dc.contributor.authorLiu, W.C.
dc.date.accessioned2010-07-29T14:45:28Zen_US
dc.date.accessioned2010-08-17T17:10:34Zen_US
dc.date.accessioned2014-02-10T20:23:33Z
dc.date.available2010-07-29T14:45:28Zen_US
dc.date.available2010-08-17T17:10:34Zen_US
dc.date.available2014-02-10T20:23:33Z
dc.date.issued1999en_US
dc.identifier99-0020en_US
dc.identifier.govdocPB2000-105993en_US
dc.identifier.urihttp://hdl.handle.net/10477/743en_US
dc.description.abstractThe research was performed to measure the ground vibration level at a site in West Seneca, NY to determine if the site was suitable for the fabrication of the second generation of IC chips (ChipFab). The site is located near a major expressway, a train thoroughfare, and an active mining operation. Measurements were taken between November 3-25, 1998 and included the following vibration sources: trains, ground traffic, blasts, and windy weather with heavy water waves in Lake Erie. The key issues involved: 1) the selection of suitable sensors with sufficient sensitivity, low measurement frequency and other appropriate qualifications; 2) the configuration of the measurement system setup (including calibration, acoustic isolation, and data acquisition); 3) procedures to ensure the signal pickup; and 4) development of appropriate methods for data analyses. The report also introduces the theoretical development for the relationship between frequency spectra and RMS values which can be adopted for a wide range of applications on interpretations of the data obtained from up-to-date data acquisition systems. (Adapted from authors' abstract).en_US
dc.description.sponsorshipUniversity at Buffaloen_US
dc.format.extent144en_US
dc.titleDevelopment of Measurement Capability for Micro-Vibration Evaluations with Application to Chip Fabrication Facilitiesen_US


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