Mechanical Behavior of Polycrystalline Copper Microbeams
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This study investigates the mechanical properties of polycrystalline copper micro-cantilevers. To accomplish this, the grain size of the polycrystalline copper samples was reduced using equal channel angular pressing (ECAP) so that the average grain size was comparable to the cantilever thickness. Utilizing electron backscatter diffraction (EBSD), a final average grain size was determined to be 2.22μm after 8 ECAP passes. Cantilever beams with an average thickness ranging from 4.19μm to 0.97μm were fabricated using focused ion beam (FIB) micromachining. A series of indention tests were performed on these cantilevers using an atomic force microscope (AFM), allowing for an experimental determination of cantilever stiffness. These experimental results were compared to classical theory through the use of the commercial finite element analysis (FEA) software, ANSYS. This comparison showed that the stiffness of the micro cantilevers followed classical theory within the bounds of experimental error for the geometries analyzed.